Calibration
Fine-tuning for X-Y Calibration
Rev. D Dimension 3100 Manual 327
Figure 17.7a Calibration Horizontal Reference
5. Verify that the microscope’s measured distance agrees with the known horizontal distance. If
there is significant disagreement between the two, fine tuning is required; go to the next step.
If the displayed distance agrees with the known distance, skip to Section 17.7.4.
6. Based upon the results in the above step, divide the known distance by the distance displayed
next to the line drawn a few steps earlier.
7. Select the Realtime > Microscope > Calibrate > Scanner option. The Scanner
Calibration dialog box displays (see Figure 17.7b).
Figure 17.7b Scanner Calibration Panel
Draw a horizontal line.
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Known distance between features
SPM-calculated distance between features
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